microelectronics tech 7068

Georgia Institute of Technology

ECE 6450 — Microelectronics Tech

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FinFET Fabrication Process on SOI

ECE 6450 · Georgia Institute of Technology

Fabrication of DRAM

ECE 6450 · Georgia Institute of Technology

12p

Study of Plasma-Induced Gate Oxide Damage

ECE 6450 · Georgia Institute of Technology

19p

Principles of Electron Beam Lithography

ECE 6450 · Georgia Institute of Technology