What This Document Is
This is a take-home assignment for ELENG C247B, Introduction to MEMS Design, at the University of California, Berkeley. It focuses on practical application of MEMS design principles, specifically relating to foundry services and established design practices. This assignment challenges students to translate theoretical knowledge into tangible designs using industry-standard processes. It’s designed to reinforce understanding of microfabrication constraints and optimization techniques.
Why This Document Matters
This assignment is crucial for students enrolled in an introductory MEMS design course, or those preparing for more advanced work in the field. It’s particularly beneficial for anyone seeking hands-on experience with CAD tools and a deeper understanding of how design choices impact device performance. Students will benefit from working through this assignment as they prepare for projects involving real-world MEMS fabrication and testing. It’s ideal for use during the problem-solving phase of a MEMS design project, or as a study aid to solidify core concepts.
Topics Covered
* Comb-drive resonator design
* MEMS design rules and constraints (specifically related to the MCNC/MUMPS process)
* Electrostatic actuation principles
* Mechanical spring design (folded springs)
* Parameterization in CAD for flexible design
* Resonant frequency and static deflection calculations
* Mass estimation for MEMS structures
* Bonding pad design and electrical connections
What This Document Provides
* A detailed assignment prompt outlining specific design challenges.
* Requirements for creating an array of comb-drive resonators with varying parameters.
* Instructions for incorporating grounding planes into the design.
* Guidance on performing calculations related to spring constants, mass, deflection, and resonant frequency.
* A bonus design challenge focused on electrostatic actuator optimization.
* Deliverables including design layouts and supporting analysis.