What This Document Is
This document details important information for the final exam in Introduction to MEMS Design (EE C245 / ME C218) at the University of California, Berkeley. It serves as a comprehensive guide outlining logistical details, the scope of the exam, and key subject areas students should focus on in their final preparation. It’s designed to help students understand expectations and prioritize their study efforts.
Why This Document Matters
This resource is essential for any student enrolled in the course who is preparing for the final exam. It’s particularly useful in the days leading up to the exam, providing clarity on available support, the exam format, and the specific concepts that will be assessed. Understanding the details within will help students approach the exam with confidence and maximize their performance. Accessing this information can significantly improve your exam strategy.
Topics Covered
* Fundamental MEMS fabrication processes
* Mechanical behavior of MEMS structures, including stress and stiction
* MEMS process flow design and layout considerations
* Surface and bulk micromachining techniques
* Mechanics of materials relevant to MEMS devices
* Microstructural element analysis and design
* Transducer modeling and equivalent circuit construction
* Sensing circuit topologies and analysis
* Inertial sensor operation (gyroscopes and accelerometers)
* Noise analysis in MEMS systems
* Scaling effects in MEMS design
What This Document Provides
* Specific date, time, and location of the final exam
* Information regarding extra office hours and TA support available before the exam
* A clear statement of the exam format (open book, open notes)
* A detailed overview of the material that will be covered on the exam, with emphasis on post-midterm topics
* A categorized list of key concepts and areas of focus for study
* Guidance on the level of understanding expected for each topic (qualitative and quantitative)
