What This Document Is
This document provides detailed information relating to the practical characterization of microfabricated devices within the context of ELENG 143: Microfabrication Technology at UC Berkeley. It serves as a crucial resource for understanding the operational procedures and settings for various measurement setups used in the course. The material focuses on utilizing specific equipment to analyze device performance and extract key electrical characteristics. It appears to be a lab-focused guide, detailing how to connect and configure instruments for accurate data acquisition.
Why This Document Matters
This resource is essential for students enrolled in ELENG 143 who are performing hands-on experiments. It’s particularly valuable when preparing for lab sessions, troubleshooting measurement issues, or interpreting experimental results. Students will find it helpful to review this material *before* attempting to operate the equipment, ensuring a safer and more efficient lab experience. It’s also a useful reference during data analysis to understand the context of the collected measurements. Access to the full document will ensure you are fully prepared for successful experimentation.
Topics Covered
* Electrical characterization techniques for semiconductor devices
* Operation of Source Measure Units (SMUs) in various modes (Resistor, Diode, MOSFET)
* Capacitance-Voltage (C-V) measurements and analysis
* Proper connection and configuration of measurement equipment
* Considerations for minimizing noise and maximizing measurement accuracy
* Specific settings for characterizing different device structures (e.g., MOSFETs with varying channel lengths/widths, different oxide materials)
What This Document Provides
* Detailed diagrams illustrating equipment connections for different measurement configurations.
* Guidance on setting appropriate compliance levels and voltage ranges for various devices.
* Information on specific measurement parameters and their impact on results.
* Notes on potential sources of error and best practices for data collection.
* Instructions regarding environmental factors impacting measurement quality (e.g., light sensitivity).
* References to specific device configurations and their corresponding measurement setups.
