What This Document Is
This handout originates from ELENG C245, Introduction to MEMS Design at UC Berkeley. It’s a focused collection of notes and concepts related to the design and fabrication of Micro-Electro-Mechanical Systems (MEMS). The material delves into the core principles governing the behavior of these miniature devices, bridging theoretical foundations with practical design considerations. It appears to be a compilation of lecture material, likely used as a reference during the course.
Why This Document Matters
This resource is invaluable for students currently enrolled in an introductory MEMS design course, or those seeking a deeper understanding of the fundamental mechanics behind these systems. It’s particularly useful when tackling design projects, analyzing actuator performance, or preparing for more advanced coursework in the field. Engineers and researchers new to MEMS will also find it a helpful starting point for grasping key concepts. Access to the full content will allow for a comprehensive understanding of the intricacies of MEMS design.
Topics Covered
* Electrostatic actuation principles and limitations
* Mechanical design considerations for MEMS actuators
* Beam theory applied to MEMS structures
* Modeling of damping effects in MEMS devices (Couette & Squeeze-film)
* Dynamic analysis of MEMS systems
* Actuator power dissipation calculations
* Spring constant calculations for various beam configurations
* Basic lever arm design principles
* Digital-to-Analog Converter (DAC) implementation in MEMS
What This Document Provides
* Key equations relating to spring constants and force calculations.
* Discussions of factors influencing actuator performance, such as residual stress and pull-in voltage.
* An overview of different actuator types, including comb drives and gap-closing mechanisms.
* Considerations for analyzing dynamic forces and resonant frequencies in MEMS.
* Insights into the relationship between design parameters and system behavior.
* Examples relating to inchworm motor design and silicon-based actuators.
