What This Document Is
These are lecture notes from EE143: Microfabrication Technology, a course offered at the University of California, Berkeley. This particular set of notes corresponds to Lecture 1 of the Fall 2010 semester. They provide a foundational overview of the field, setting the stage for more in-depth exploration of microfabrication principles and techniques. The notes are a direct record of the instructor’s presentation, offering valuable insights into the core concepts of the course.
Why This Document Matters
This resource is ideal for students currently enrolled in, or planning to take, a microfabrication course. It’s also beneficial for professionals in related fields – such as electrical engineering, materials science, and MEMS – who need a refresher on fundamental concepts. Reviewing these notes early in a course can help solidify understanding, while revisiting them later can aid in exam preparation and project work. Individuals seeking a structured introduction to the world of microfabrication will find this a helpful starting point.
Topics Covered
* Course logistics: including instructor contact information, office hours, and lab sign-up procedures.
* Overview of microfabrication for both Integrated Circuits (ICs) and Micro-Electro-Mechanical Systems (MEMS).
* Key areas within microfabrication, including materials, automation, and process flow.
* Historical trends and future directions in microfabrication technology.
* Relevant external resources and websites for further exploration.
* An introduction to the scaling of transistor technology and Moore’s Law.
What This Document Provides
* A detailed course schedule and important dates.
* Links to recommended websites for device physics visualization, MEMS examples, and industry roadmaps.
* A list of required textbooks and supplementary materials.
* Information regarding homework assignments and grading breakdown.
* Visual aids, including photographs of wafers and diagrams illustrating fabrication processes.
* An initial exploration of the core principles underlying modern chip fabrication.
