What This Document Is
This resource is a focused exploration of comb-drive actuators within the field of Microfabrication Technology. Developed for the ELENG 143 course at UC Berkeley, it delves into the specifics of these microelectromechanical systems (MEMS) devices. It appears to be a supplemental material used in conjunction with coursework, providing detailed information on a particular type of actuator commonly used in MEMS design and fabrication. The material centers around a specific mask layout featuring multiple comb-drive actuators.
Why This Document Matters
Students enrolled in microfabrication courses, particularly those focusing on MEMS, will find this resource valuable. It’s especially helpful for individuals seeking a deeper understanding of comb-drive actuator design considerations and practical implementations. This material would be beneficial when tackling assignments or projects involving actuator selection, layout design, or performance analysis. Researchers and engineers working with MEMS devices may also find it a useful reference point for understanding specific design parameters.
Topics Covered
* Comb-drive actuator fundamentals
* Geometric parameters influencing actuator performance
* Microfabrication considerations for comb-drive devices
* Actuator layout and design variations
* Relationship between physical dimensions and potential actuator behavior
* References to established research in the field of MEMS resonators
What This Document Provides
* Detailed specifications for a comb-drive actuator mask layout.
* Dimensional information relating to key features like comb width, spacing, shuttle size, and beam lengths.
* Visual references to different comb-drive designs with varying beam lengths.
* Citations to relevant academic publications for further research.
* A link to an external resource demonstrating comb-drive actuator operation.
