What This Document Is
These are comprehensive course notes for Introduction to MEMS Design (ELENG C245) at the University of California, Berkeley. This material delves into the fundamental principles and practical techniques used in the design and fabrication of Micro-Electro-Mechanical Systems (MEMS). It serves as a detailed companion to lectures, offering an in-depth exploration of both theoretical concepts and the processes involved in bringing MEMS devices to life. The notes cover a range of fabrication methods and material properties crucial for successful MEMS development.
Why This Document Matters
This resource is invaluable for students enrolled in a MEMS design course, or those seeking a strong foundation in the field. It’s particularly helpful for clarifying complex concepts presented in lectures and preparing for projects involving the design and potential fabrication of microscale devices. Engineers and researchers interested in understanding the core principles behind MEMS technology will also find this a useful reference. Access to these notes will enhance your understanding of the entire MEMS design workflow.
Topics Covered
* Bulk Micromachining techniques and considerations
* Surface Micromachining processes and historical development
* Thin Film Deposition methods and their characteristics
* Material properties relevant to MEMS design, specifically polysilicon
* Lateral resonator design and process flows
* Etching processes – wet, dry, isotropic, and anisotropic
* Chemical Vapor Deposition (CVD) techniques and parameters
* The relationship between process parameters and film conformality
What This Document Provides
* A detailed review of foundational micromachining concepts.
* An overview of various fabrication methods used in MEMS.
* Discussions of material selection and their mechanical properties.
* Insights into the historical progression of surface micromachining techniques.
* Exploration of different thin film deposition techniques and their applications.
* A structured outline of lecture topics for easy navigation and reference.
* Key definitions and explanations of important terminology in the field of MEMS.