What This Document Is
This is a comprehensive lab report for Microfabrication Technology (ELENG 143) at the University of California, Berkeley. Specifically, it details the work completed for Lab One of the course, requiring students to analyze and document a full fabrication process flow. It’s a substantial report designed to assess practical understanding and analytical skills related to semiconductor device fabrication. The report emphasizes a detailed, structured approach to documenting experimental procedures and results.
Why This Document Matters
This report is essential for students enrolled in the Microfabrication Technology course. It serves as a key assessment of their ability to apply theoretical knowledge to a hands-on laboratory experience. Students preparing for similar courses in microelectronics, materials science, or related engineering fields can also benefit from understanding the structure and expectations of a professional-level lab report in this domain. It’s particularly valuable when needing a model for documenting complex fabrication processes and analyzing potential deviations.
Topics Covered
* MOSFET Fabrication Process Flow
* Photolithography Techniques & Analysis
* Thin Film Deposition & Etching Processes
* Process Monitoring & Metrology
* Misalignment Analysis in Semiconductor Manufacturing
* Identification of Potential Fabrication Issues
* Impact of Process Variations on Device Performance
* Cross-Sectional Analysis of Semiconductor Structures
What This Document Provides
* A structured template for a comprehensive microfabrication lab report.
* Detailed sections for documenting process procedures, calculations, and answers to related questions.
* Requirements for visual representations, including cross-sectional profiles and top views of fabricated structures.
* A framework for analyzing process monitoring data, such as film thickness, line width, and resistivity measurements.
* Guidance on identifying and evaluating potential problems encountered during batch fabrication and individual wafer processing.
* A scoring rubric outlining the point distribution for each section of the report.
