What This Document Is
This document comprises lecture module 9 from the Introduction to MEMS Design course (ELENG C245) at the University of California, Berkeley. It focuses on advanced analytical techniques used in Micro-Electro-Mechanical Systems (MEMS) design, specifically exploring methods centered around energy principles. This material builds upon foundational mechanics knowledge and introduces a powerful approach to analyzing the behavior of MEMS structures. It’s designed for students seeking a deeper understanding of structural mechanics as applied to miniaturized devices.
Why This Document Matters
This resource is invaluable for students enrolled in an introductory MEMS design course, or those studying related fields like mechanical engineering or materials science. It’s particularly helpful when dealing with complex geometries where traditional methods become cumbersome. Understanding these energy-based approaches is crucial for accurately predicting the performance and reliability of MEMS devices, and for optimizing designs before fabrication. This module will be most beneficial when you are tackling problems involving deformation and stress analysis in microscale systems.
Topics Covered
* The Principle of Virtual Work and its application to MEMS
* Energy formulations for mechanical systems
* Analysis of structures with non-trivial geometries
* Strain energy density and its components (axial, bending, shear)
* Approaches to estimating resonance frequencies
* Application to cantilever beam structures
What This Document Provides
* A detailed lecture outline for Module 9
* A conceptual framework for understanding energy methods in MEMS
* Discussion of the limitations of simpler beam theories and the need for more advanced techniques
* Formulations for calculating stored energy and work done in elastic systems
* A foundation for applying these principles to solve practical MEMS design problems
* References to further reading materials (Senturia, Chpt. 10)
