What This Document Is
This document provides essential information for students enrolled in EE C245 / ME C218, Introduction to MEMS Design at UC Berkeley, specifically regarding the upcoming midterm examination. It’s a focused resource designed to prepare students for a comprehensive assessment of the course material covered to date. It outlines logistical details and highlights key areas of focus for study.
Why This Document Matters
This resource is invaluable for any student preparing for the midterm exam in this MEMS Design course. It’s best utilized in the days leading up to the exam to ensure a clear understanding of the exam’s scope, format, and expectations. Students can use this information to prioritize their study efforts and focus on the most critical concepts. Understanding the exam guidelines can significantly reduce test-day anxiety and improve performance.
Topics Covered
* Fundamental MEMS fabrication processes (oxidation, deposition, lithography, etching, etc.)
* Physical principles governing stiction and structural deformation in MEMS devices.
* Design and implementation of MEMS process flows and layouts.
* Surface micromachining techniques, including release strategies and stress management.
* Bulk micromachining methods, such as wet etching, DRIE, and bonding.
* Mechanical behavior of materials used in MEMS, including stress, strain, and property characterization.
* Analysis of microstructural elements like bending moments and spring configurations.
* Application of energy methods for determining deflection and resonance frequencies.
What This Document Provides
* Specific dates, times, and location for the midterm exam.
* Clarification on the exam format (open book, open notes).
* Guidance on permitted materials (calculators).
* A prioritized list of core concepts and subject areas to concentrate on during preparation.
* Information regarding extra office hours offered by the professor to support student learning.
* Emphasis on the importance of showing all work for full credit.
