What This Document Is
These are lecture notes from ELENG 143: Microfabrication Technology at UC Berkeley, specifically covering Lecture 26 of the course. The notes detail a range of advanced techniques used in the creation of microelectromechanical systems (MEMS) and other microfabricated devices. It builds upon foundational microfabrication principles, diving into more specialized processes and applications. The material is presented in a lecture format, likely accompanied by diagrams and illustrations to aid understanding.
Why This Document Matters
This resource is invaluable for students currently enrolled in a microfabrication course, or those seeking a deeper understanding of the practical methods used to build microscopic devices. It’s particularly useful for individuals preparing for projects or research involving MEMS, microfluidics, or related fields. Engineers and researchers needing a refresher on specific fabrication techniques will also find this a helpful reference. Access to these notes can significantly enhance comprehension of complex processes discussed in class or encountered in professional settings.
Topics Covered
* Deep Reactive Ion Etching (DRIE) techniques and applications
* Utilizing Silicon-on-Insulator (SOI) wafers in MEMS fabrication
* Micro-molding processes, including the LIGA technique
* The SCREAM process and its various etching steps
* Principles of capacitive sensing and transducer design
* Micro-actuator technologies, including thermal bimorph actuators
* Fabrication of micro-tweezers using selective CVD
* Micro-resonator designs and their operational principles
* Gas breakdown phenomena and electrostatic actuation
* Pneumatic valve design and fabrication
What This Document Provides
* An overview of advanced etching techniques for creating complex microstructures.
* Insights into process flows for fabricating specific devices, such as micro-tweezers and pneumatic valves.
* Conceptual explanations of sensor and actuator mechanisms.
* Visual representations of fabrication steps and device designs.
* A foundation for understanding the challenges and considerations in microfabrication process development.
* Exploration of emerging applications of microfabrication, such as DNA detection.
