What This Document Is
This is a practice problem set designed to reinforce your understanding of key concepts in Microfabrication Technology (ELENG 143) at UC Berkeley. It’s structured to help you apply theoretical knowledge to practical scenarios encountered in the field. This set focuses on solidifying your ability to analyze and troubleshoot common issues in microfabrication processes.
Why This Document Matters
This resource is invaluable for students actively learning microfabrication techniques. It’s particularly useful for those preparing for assessments, wanting to test their comprehension of course material, or seeking to build confidence in their problem-solving skills. Working through these problems will help identify areas where further study may be beneficial, and improve your overall performance in the course. It’s best utilized *after* you’ve engaged with the core lecture materials and readings.
Topics Covered
* Lithography alignment and error analysis
* Thermal expansion effects on mask alignment
* Projection printing systems (1:1 and steppers) and their impact on accuracy
* Process flow analysis and interpretation
* Wet etching principles and etch rate calculations
* Cantilever structure fabrication and release
* Cross-sectional analysis of fabricated structures
* Understanding the impact of isotropic etching
What This Document Provides
* A series of targeted problems designed to challenge your understanding of microfabrication principles.
* Scenarios involving common fabrication steps, such as oxidation, lithography, etching, and deposition.
* Opportunities to practice applying calculations related to thermal expansion and etch rates.
* Layout diagrams to aid in visualizing process flows and resulting structures.
* A framework for developing a systematic approach to problem-solving in microfabrication.
