What This Document Is
This is a problem sheet designed to reinforce your understanding of key concepts in Microfabrication Technology (ELENG 143) at UC Berkeley. It presents a series of challenges focused on process flow design within the context of planar fabrication techniques. The sheet requires you to apply theoretical knowledge to practical scenarios, demanding a detailed understanding of the relationships between processing steps and resulting device structures. It’s intended to be a hands-on exercise to solidify learning from lectures and assigned readings.
Why This Document Matters
This resource is invaluable for students enrolled in advanced microfabrication courses. It’s particularly helpful when preparing for exams or quizzes that assess your ability to synthesize information and create complete process flows. Working through these problems will strengthen your ability to visualize device fabrication and predict the impact of each step on the final device characteristics. It’s best utilized *after* a thorough review of the course lecture notes and assigned textbook chapters.
Topics Covered
* NMOS Process Flow Design
* DRAM (Double Poly-Si) Fabrication
* Integrated Circuit (IC) Process Integration
* RC Filter Implementation in Microfabrication
* Advanced MOSFET Structures (Gate-Last, Sub-50nm)
* Process Flow Sequencing and Cross-Sectional Analysis
* Impact of Material Constraints on Process Design
What This Document Provides
* A series of detailed problem statements requiring process flow development.
* Descriptions of device structures and performance requirements.
* Starting material specifications and process constraints.
* Opportunities to practice sketching device cross-sections at critical processing stages.
* A framework for understanding the complexities of integrated circuit manufacturing.
* A chance to apply knowledge of lithography, etching, deposition, and implantation techniques.
